Raman spectroscopy studies of the influence of substrate temperature and ion beam energy on CNx thin films deposited by nitrogen-ion-assisted pulsed laser deposition

by Ren, Z.M., Lu, Y.F., Ho, D.H.K., Chong, T.C., Cheong, B.A., Pang, S.I., Wang, J.P., Li, K.
Published 2014