Raman spectroscopy studies of the influence of substrate temperature and ion beam energy on CNx thin films deposited by nitrogen-ion-assisted pulsed laser deposition

Raman spectroscopy studies of the influence of substrate temperature and ion beam energy on CNx thin films deposited by nitrogen-ion-assisted pulsed laser deposition

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Saved in:
Bibliographic Details
Main Authors: Ren, Z.M., Lu, Y.F., Ho, D.H.K., Chong, T.C., Cheong, B.A., Pang, S.I., Wang, J.P., Li, K.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Carbon nitride
Laser ablation
Raman spectroscopy
Thin films
XPS
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81049
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/81049

Similar Items