Wafer Scale Manufacturing of High Precision Micro-Optical Components through X-Ray Lithography yielding 1800 Gray Levels in a Fingertip Sized Chip

by Kalaiselvi, Shenbaga Manogara Pandian, Xiaosong, Eric Tang, Oskar, Herbert Moser, B.H., Mark Breese, Turaga, Shuvan Prashant, Kasi, Harsha, Heussler, Sascha Pierre
Published 2021