Wafer Scale Manufacturing of High Precision Micro-Optical Components through X-Ray Lithography yielding 1800 Gray Levels in a Fingertip Sized Chip

Wafer Scale Manufacturing of High Precision Micro-Optical Components through X-Ray Lithography yielding 1800 Gray Levels in a Fingertip Sized Chip

Nature Nanotechnology

Saved in:
Bibliographic Details
Main Authors: Kalaiselvi, Shenbaga Manogara Pandian, Xiaosong, Eric Tang, Oskar, Herbert Moser, B.H., Mark Breese, Turaga, Shuvan Prashant, Kasi, Harsha, Heussler, Sascha Pierre
Other Authors: DEPT OF PHYSICS
Format: Article
Published: Springer Nature 2021
Online Access:https://scholarbank.nus.edu.sg/handle/10635/192120
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore

Internet

https://scholarbank.nus.edu.sg/handle/10635/192120

Similar Items