Wafer Scale Manufacturing of High Precision Micro-Optical Components through X-Ray Lithography yielding 1800 Gray Levels in a Fingertip Sized Chip
Nature Nanotechnology
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2021
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sg-nus-scholar.10635-1921202024-11-14T18:38:58Z Wafer Scale Manufacturing of High Precision Micro-Optical Components through X-Ray Lithography yielding 1800 Gray Levels in a Fingertip Sized Chip Kalaiselvi, Shenbaga Manogara Pandian Xiaosong, Eric Tang Oskar, Herbert Moser B.H., Mark Breese Turaga, Shuvan Prashant Kasi, Harsha Heussler, Sascha Pierre PHYSICS SINGAPORE SYNCHROTRON LIGHT SOURCE Dr Shenbaga Manogara Pandian Kalaiselvi Nature Nanotechnology 2021-06-21T06:21:27Z 2021-06-21T06:21:27Z 2021-06-18 2021-06-21T05:24:10Z Article Kalaiselvi, Shenbaga Manogara Pandian, Xiaosong, Eric Tang, Oskar, Herbert Moser, B.H., Mark Breese, Turaga, Shuvan Prashant, Kasi, Harsha, Heussler, Sascha Pierre (2021-06-18). Wafer Scale Manufacturing of High Precision Micro-Optical Components through X-Ray Lithography yielding 1800 Gray Levels in a Fingertip Sized Chip. Nature Nanotechnology. ScholarBank@NUS Repository. 17483387 https://scholarbank.nus.edu.sg/handle/10635/192120 Springer Nature Elements |
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Nature Nanotechnology |
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PHYSICS |
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PHYSICS Kalaiselvi, Shenbaga Manogara Pandian Xiaosong, Eric Tang Oskar, Herbert Moser B.H., Mark Breese Turaga, Shuvan Prashant Kasi, Harsha Heussler, Sascha Pierre |
| format |
Article |
| author |
Kalaiselvi, Shenbaga Manogara Pandian Xiaosong, Eric Tang Oskar, Herbert Moser B.H., Mark Breese Turaga, Shuvan Prashant Kasi, Harsha Heussler, Sascha Pierre |
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Kalaiselvi, Shenbaga Manogara Pandian Xiaosong, Eric Tang Oskar, Herbert Moser B.H., Mark Breese Turaga, Shuvan Prashant Kasi, Harsha Heussler, Sascha Pierre Wafer Scale Manufacturing of High Precision Micro-Optical Components through X-Ray Lithography yielding 1800 Gray Levels in a Fingertip Sized Chip |
| author_sort |
Kalaiselvi, Shenbaga Manogara Pandian |
| title |
Wafer Scale Manufacturing of High Precision Micro-Optical Components through X-Ray Lithography yielding 1800 Gray Levels in a Fingertip Sized Chip |
| title_short |
Wafer Scale Manufacturing of High Precision Micro-Optical Components through X-Ray Lithography yielding 1800 Gray Levels in a Fingertip Sized Chip |
| title_full |
Wafer Scale Manufacturing of High Precision Micro-Optical Components through X-Ray Lithography yielding 1800 Gray Levels in a Fingertip Sized Chip |
| title_fullStr |
Wafer Scale Manufacturing of High Precision Micro-Optical Components through X-Ray Lithography yielding 1800 Gray Levels in a Fingertip Sized Chip |
| title_full_unstemmed |
Wafer Scale Manufacturing of High Precision Micro-Optical Components through X-Ray Lithography yielding 1800 Gray Levels in a Fingertip Sized Chip |
| title_sort |
wafer scale manufacturing of high precision micro-optical components through x-ray lithography yielding 1800 gray levels in a fingertip sized chip |
| publisher |
Springer Nature |
| publishDate |
2021 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/192120 |
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1821193343960350720 |