Wafer Scale Manufacturing of High Precision Micro-Optical Components through X-Ray Lithography yielding 1800 Gray Levels in a Fingertip Sized Chip
Nature Nanotechnology
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| Main Authors: | , , , , , , |
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| Other Authors: | |
| Format: | Article |
| Published: |
Springer Nature
2021
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| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/192120 |
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| Institution: | National University of Singapore |