$Deep X-ray lithography in the fabrication process of a 3D diffractive optical element$

Deep X-ray lithography in the fabrication process of a 3D diffractive optical element

10.1063/1.2436350

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Bibliographic Details
Main Authors:	Heussler, S.P., Moser, H.O., Quan, C.G., Tay, C.J., Moeller, K.D., Bahou, M., Jian, L.K.
Other Authors:	SINGAPORE SYNCHROTRON LIGHT SOURCE
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Diffractive optical element Fourier transform spectroscopy X-ray lithography
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/73306
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Institution:	National University of Singapore

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