Deep X-ray lithography in the fabrication process of a 3D diffractive optical element
10.1063/1.2436350
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Main Authors: | Heussler, S.P., Moser, H.O., Quan, C.G., Tay, C.J., Moeller, K.D., Bahou, M., Jian, L.K. |
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Other Authors: | SINGAPORE SYNCHROTRON LIGHT SOURCE |
Format: | Conference or Workshop Item |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/73306 |
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Institution: | National University of Singapore |
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