$Deep X-ray lithography in the fabrication process of a 3D diffractive optical element$

Deep X-ray lithography in the fabrication process of a 3D diffractive optical element

10.1063/1.2436350

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Bibliographic Details
Main Authors:	Heussler, S.P., Moser, H.O., Quan, C.G., Tay, C.J., Moeller, K.D., Bahou, M., Jian, L.K.
Other Authors:	SINGAPORE SYNCHROTRON LIGHT SOURCE
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Diffractive optical element Fourier transform spectroscopy X-ray lithography
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/73306
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-73306
record_format	dspace
spelling	sg-nus-scholar.10635-733062015-02-15T08:57:17Z Deep X-ray lithography in the fabrication process of a 3D diffractive optical element Heussler, S.P. Moser, H.O. Quan, C.G. Tay, C.J. Moeller, K.D. Bahou, M. Jian, L.K. SINGAPORE SYNCHROTRON LIGHT SOURCE MECHANICAL ENGINEERING Diffractive optical element Fourier transform spectroscopy X-ray lithography 10.1063/1.2436350 AIP Conference Proceedings 879 1503-1506 2014-06-19T05:33:34Z 2014-06-19T05:33:34Z 2007 Conference Paper Heussler, S.P.,Moser, H.O.,Quan, C.G.,Tay, C.J.,Moeller, K.D.,Bahou, M.,Jian, L.K. (2007). Deep X-ray lithography in the fabrication process of a 3D diffractive optical element. AIP Conference Proceedings 879 : 1503-1506. ScholarBank@NUS Repository. <a href="https://doi.org/10.1063/1.2436350" target="_blank">https://doi.org/10.1063/1.2436350</a> 0735403732 0094243X http://scholarbank.nus.edu.sg/handle/10635/73306 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Diffractive optical element Fourier transform spectroscopy X-ray lithography
spellingShingle	Diffractive optical element Fourier transform spectroscopy X-ray lithography Heussler, S.P. Moser, H.O. Quan, C.G. Tay, C.J. Moeller, K.D. Bahou, M. Jian, L.K. Deep X-ray lithography in the fabrication process of a 3D diffractive optical element
description	10.1063/1.2436350
author2	SINGAPORE SYNCHROTRON LIGHT SOURCE
author_facet	SINGAPORE SYNCHROTRON LIGHT SOURCE Heussler, S.P. Moser, H.O. Quan, C.G. Tay, C.J. Moeller, K.D. Bahou, M. Jian, L.K.
format	Conference or Workshop Item
author	Heussler, S.P. Moser, H.O. Quan, C.G. Tay, C.J. Moeller, K.D. Bahou, M. Jian, L.K.
author_sort	Heussler, S.P.
title	Deep X-ray lithography in the fabrication process of a 3D diffractive optical element
title_short	Deep X-ray lithography in the fabrication process of a 3D diffractive optical element
title_full	Deep X-ray lithography in the fabrication process of a 3D diffractive optical element
title_fullStr	Deep X-ray lithography in the fabrication process of a 3D diffractive optical element
title_full_unstemmed	Deep X-ray lithography in the fabrication process of a 3D diffractive optical element
title_sort	deep x-ray lithography in the fabrication process of a 3d diffractive optical element
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/73306
_version_	1681087724159762432

Deep X-ray lithography in the fabrication process of a 3D diffractive optical element

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