Deep X-ray lithography in the fabrication process of a 3D diffractive optical element

• Main Authors: Heussler, S.P., Moser, H.O., Quan, C.G., Tay, C.J., Moeller, K.D., Bahou, M., Jian, L.K.
• Other Authors: SINGAPORE SYNCHROTRON LIGHT SOURCE
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Diffractive optical element; Fourier transform spectroscopy; X-ray lithography
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/73306
• Institution: National University of Singapore

10.1063/1.2436350