In-line process monitoring using micro-raman spectroscopy

由 LIM, ENG HUA, PEY, KIN-LEONG, WONG, HARIANTO, LEE, KONG HEAN
出版 2012

Cmos gate architecture for integration of salicide process in sub 0.1. .muM devices

由 HO, CHAW SING, KARUNASIRI, R. P. G., CHUA, SOO JIN, PEY, KIN LEONG, LEE, KONG HEAN
出版 2012