Method to fabricate a double-polysilicon gate structure for a sub-quarter micron self-aligned-titanium silicide process

بواسطة PEY, KIN-LEONG, HO, CHAW SING, CHAN, LAP
منشور في 2012

Method to form uniform silicide features

بواسطة CHAN, LAP, HO, CHAW SING, LI, FONG YAU SAM, NG, HOU TEE
منشور في 2012

Pulsed laser salicidation for fabrication of ultra-thin silicides in sub-quarter micron devices

بواسطة HO, CHAW SING, LEE, YUAN PING, LAP, CHAN, LU, YONG FENG, KARUNASIRI, R.P.G.
منشور في 2012

Cmos gate architecture for integration of salicide process in sub 0.1. .muM devices

بواسطة HO, CHAW SING, KARUNASIRI, R. P. G., CHUA, SOO JIN, PEY, KIN LEONG, LEE, KONG HEAN
منشور في 2012