Pulsed laser salicidation for fabrication of ultra-thin silicides in sub-quarter micron devices

Pulsed laser salicidation for fabrication of ultra-thin silicides in sub-quarter micron devices

US6156654

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Bibliographic Details
Main Authors: HO, CHAW SING, LEE, YUAN PING, LAP, CHAN, LU, YONG FENG, KARUNASIRI, R.P.G.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Patent
Published: 2012
Online Access:http://scholarbank.nus.edu.sg/handle/10635/32584
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/32584

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