Pulsed laser salicidation for fabrication of ultra-thin silicides in sub-quarter micron devices

Pulsed laser salicidation for fabrication of ultra-thin silicides in sub-quarter micron devices

US6156654

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Bibliographic Details
Main Authors: HO, CHAW SING, LEE, YUAN PING, LAP, CHAN, LU, YONG FENG, KARUNASIRI, R.P.G.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Patent
Published: 2012
Online Access:http://scholarbank.nus.edu.sg/handle/10635/32584
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Institution: National University of Singapore
id sg-nus-scholar.10635-32584
record_format dspace
spelling sg-nus-scholar.10635-325842015-07-29T07:03:42Z Pulsed laser salicidation for fabrication of ultra-thin silicides in sub-quarter micron devices HO, CHAW SING LEE, YUAN PING LAP, CHAN LU, YONG FENG KARUNASIRI, R.P.G. ELECTRICAL & COMPUTER ENGINEERING CHARTERED SEMICONDUCTOR MANUFACTURING LTD. (SINGAPORE, SG) NATIONAL UNIVERSITY OF SINGAPORE US6156654 Granted Patent 2012-05-02T02:27:23Z 2012-05-02T02:27:23Z 2000-12-05 Patent HO, CHAW SING,LEE, YUAN PING,LAP, CHAN,LU, YONG FENG,KARUNASIRI, R.P.G. (2000-12-05). Pulsed laser salicidation for fabrication of ultra-thin silicides in sub-quarter micron devices. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32584 NOT_IN_WOS PatSnap
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description US6156654
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
HO, CHAW SING
LEE, YUAN PING
LAP, CHAN
LU, YONG FENG
KARUNASIRI, R.P.G.
format Patent
author HO, CHAW SING
LEE, YUAN PING
LAP, CHAN
LU, YONG FENG
KARUNASIRI, R.P.G.
spellingShingle HO, CHAW SING
LEE, YUAN PING
LAP, CHAN
LU, YONG FENG
KARUNASIRI, R.P.G.
Pulsed laser salicidation for fabrication of ultra-thin silicides in sub-quarter micron devices
author_sort HO, CHAW SING
title Pulsed laser salicidation for fabrication of ultra-thin silicides in sub-quarter micron devices
title_short Pulsed laser salicidation for fabrication of ultra-thin silicides in sub-quarter micron devices
title_full Pulsed laser salicidation for fabrication of ultra-thin silicides in sub-quarter micron devices
title_fullStr Pulsed laser salicidation for fabrication of ultra-thin silicides in sub-quarter micron devices
title_full_unstemmed Pulsed laser salicidation for fabrication of ultra-thin silicides in sub-quarter micron devices
title_sort pulsed laser salicidation for fabrication of ultra-thin silicides in sub-quarter micron devices
publishDate 2012
url http://scholarbank.nus.edu.sg/handle/10635/32584
_version_ 1681081250123612160

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