LASER CLEANING OF PLASMA-ETCH-INDUCED POLYMERS FROM VIA HOLES AND OTHER SUBMICRON STRUCTURES ON SILICON WAFERS

由 LEE YUAN PING
出版 2020

Pulsed laser salicidation for fabrication of ultra-thin silicides in sub-quarter micron devices

由 HO, CHAW SING, LEE, YUAN PING, LAP, CHAN, LU, YONG FENG, KARUNASIRI, R.P.G.
出版 2012