Ion irradiation-induced interface mixing and the charge trap profiles investigated by in situ electrical measurements in Pt/Al₂O₃/β-Ga₂O₃MOSCAPs

by Manikanthababu, N., Joishi, C., Biswas, J., Prajna, K., Asokan, K., Vas, Joseph Vimal, Medwal, R., Meena, R.C., Lodha, S., Singh, R.
Published 2023