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Mohd Jeffery Manaf,
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Mohd Jeffery Manaf,
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Mohd Jeffery Manaf,
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Characterization of alignment strategy to achieve a reliable alignment accuracy in advanced lithography
by
Normah Ahmad
,
Uda Hashim
,
Mohd
Jeffery
Manaf
,
Kadir Ibrahim Abdul Wahab
Published 2007
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2
Effect of alignment mark architecture on alignment signal behavior in advanced lithography
by
Normah, Ahmad
,
Uda, Hashim
,
Mohd
Jeffery
,
Manaf
,
Kader Ibrahim, Abdul Wahab
Published 2009
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3
Effect of alignment mark depth on alignment signal behavior in advanced lithography
by
Normah, Ahmad
,
Uda, Hashim
,
Mohd
Jeffery
,
Manaf
,
Kader Ibrahim, Abdul Wahab
Published 2017
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