SiC<inf>x</inf>H<inf>y</inf>-based hydrophobic thin films with good chemical and mechanical properties synthesized by PECVD at various substrate temperatures

بواسطة Jun S. Lee, Su B. Jin, N. Vichiansan, Jeon G. Han, M. Hori, K. Leksakul
منشور في 2018

SiC<inf>x</inf>H<inf>y</inf>-based hydrophobic thin films with good chemical and mechanical properties synthesized by PECVD at various substrate temperatures

بواسطة Jun S. Lee, Su B. Jin, N. Vichiansan, Jeon G. Han, M. Hori, K. Leksakul
منشور في 2018