Integrated approach for low-temperature synthesis of high-quality silicon nitride films in PECVD using RF-UHF hybrid plasmas

由 B. B. Sahu, Kyung S. Shin, Jeon G. Han
出版 2018

Effect of helium incorporation on plasma parameters and characteristic properties of hydrogen free carbon films deposited using DC magnetron sputtering

由 Bibhuti B. Sahu, Sung I. Kim, Min W. Lee, Jeon G. Han
出版 2020

Plasma diagnostic in LiMn<inf>2</inf>O<inf>4</inf> thin film process for Li-ion battery application

由 Bibhuti B. Sahu, Seok H. Kim, Sehwan Kim, Jeon G. Han, Sunkook Kim
出版 2020

SiC<inf>x</inf>H<inf>y</inf>-based hydrophobic thin films with good chemical and mechanical properties synthesized by PECVD at various substrate temperatures

由 Jun S. Lee, Su B. Jin, N. Vichiansan, Jeon G. Han, M. Hori, K. Leksakul
出版 2018

SiC<inf>x</inf>H<inf>y</inf>-based hydrophobic thin films with good chemical and mechanical properties synthesized by PECVD at various substrate temperatures

由 Jun S. Lee, Su B. Jin, N. Vichiansan, Jeon G. Han, M. Hori, K. Leksakul
出版 2018