Integrated approach for low-temperature synthesis of high-quality silicon nitride films in PECVD using RF-UHF hybrid plasmas

by B. B. Sahu, Kyung S. Shin, Jeon G. Han
Published 2018

Advantage of dual-confined plasmas over conventional and facing-target plasmas for improving transparent-conductive properties in Al doped ZnO thin films

by Long Wen, Manish Kumar, B. B. Sahu, S. B. Jin, C. Sawangrat, K. Leksakul, J. G. Han
Published 2018

Advantage of dual-confined plasmas over conventional and facing-target plasmas for improving transparent-conductive properties in Al doped ZnO thin films

by Long Wen, Manish Kumar, B. B. Sahu, S. B. Jin, C. Sawangrat, K. Leksakul, J. G. Han
Published 2018