Advantage of dual-confined plasmas over conventional and facing-target plasmas for improving transparent-conductive properties in Al doped ZnO thin films

Advantage of dual-confined plasmas over conventional and facing-target plasmas for improving transparent-conductive properties in Al doped ZnO thin films

© 2015 Elsevier B.V. Al doped ZnO films are prepared in dual-confined plasmas (rectangular side-ways and one top-side) in DC magnetron sputtering system without intentional substrate-heating. Present confinement shows improved transparent-conductive properties in Al doped ZnO thin films, when compa...

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Bibliographic Details
Main Authors: Long Wen, Manish Kumar, B. B. Sahu, S. B. Jin, C. Sawangrat, K. Leksakul, J. G. Han
Format: Journal
Published: 2018
Subjects:
Agricultural and Biological Sciences
Online Access:https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84937906654&origin=inward
http://cmuir.cmu.ac.th/jspui/handle/6653943832/43963
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Institution: Chiang Mai University

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https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84937906654&origin=inward
http://cmuir.cmu.ac.th/jspui/handle/6653943832/43963

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