Plasma diagnostic in LiMn<inf>2</inf>O<inf>4</inf> thin film process for Li-ion battery application
© 2020 Elsevier B.V. This work reports an advanced plasma-material process comprising the process design, plasma characterization, and surface engineering of LiMn2O4 films deposited by dual RF magnetron sputtering (MS). Several plasma diagnostic techniques integrated with the MS system were carefull...
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| Main Authors: | , , , , |
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| Format: | Journal |
| Published: |
2020
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| Subjects: | |
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85086592512&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/70372 |
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| Institution: | Chiang Mai University |