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POH, FRANCIS YOUG WEE
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POH, FRANCIS YOUG WEE
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Process flow for a performance enhanced MOSFET with self-aligned, recessed channel
by
SNEELAL, SNEEDHARAN PILLAI
,
POH
,
FRANCIS
YOUG
WEE
,
LEE, JAMES YONG MENG
,
SEE, ALEX
,
LAU, C. K.
,
SAMUDRA, GANESH SHANKAR
Published 2012
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