Effect of Acetylene Concentration on Structural Properties of Hydrogenated Amorphous Carbon Films Prepared using Showerhead Plasma Chemical Vapor Deposition

by Artit Chingsungnoen, Thananchai Dasri, Phitsanu Poolcharuansin, Anthika Lakhonchai, Nongkhan Tidngim, Pitak Eiamchai, Noppadon Nuntawong, Vittaya Amornkitbamrung
Published 2019