Effect of Acetylene Concentration on Structural Properties of Hydrogenated Amorphous Carbon Films Prepared using Showerhead Plasma Chemical Vapor Deposition

Effect of Acetylene Concentration on Structural Properties of Hydrogenated Amorphous Carbon Films Prepared using Showerhead Plasma Chemical Vapor Deposition

Acetylene/argon plasma was used to deposit hydrogenated amorphous carbon (a-C:H) films using showerhead plasma CVD. The upper electrode was designed like a showerhead to spray gasses onto the grounded electrode and is connected to 10 kHz RF power. The a-C:H films were fabricated with a deposition ti...

Full description

Saved in:
Bibliographic Details
Main Authors: Artit Chingsungnoen, Thananchai Dasri, Phitsanu Poolcharuansin, Anthika Lakhonchai, Nongkhan Tidngim, Pitak Eiamchai, Noppadon Nuntawong, Vittaya Amornkitbamrung
Format: บทความวารสาร
Language:English
Published: Science Faculty of Chiang Mai University 2019
Online Access:http://it.science.cmu.ac.th/ejournal/dl.php?journal_id=9532
http://cmuir.cmu.ac.th/jspui/handle/6653943832/64219
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: Chiang Mai University
Language: English

Internet

http://it.science.cmu.ac.th/ejournal/dl.php?journal_id=9532
http://cmuir.cmu.ac.th/jspui/handle/6653943832/64219

Similar Items