Spectroscopic electron temperature measurement in methane/helium plasma during diamond-like carbon coating
The electron temperature () was extracted from the capacitively-coupled radio frequency (CCRF) plasma reactor by the spectral line intensity ratio method. The measured intensity ratio of 587.6/706.5 nm from CH4/He plasma was used to calculate the electron temperature under the steady state corona (S...
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| Main Authors: | , |
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| Language: | English |
| Published: |
Science Faculty of Chiang Mai University
2019
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| Subjects: | |
| Online Access: | http://it.science.cmu.ac.th/ejournal/dl.php?journal_id=5521 http://cmuir.cmu.ac.th/jspui/handle/6653943832/66760 |
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| Institution: | Chiang Mai University |
| Language: | English |