Spectroscopic electron temperature measurement in methane/helium plasma during diamond-like carbon coating

• Main Authors: Artit Chingsungnoen", Vittaya Amornkitbamrung
• Language: English
• Published: Science Faculty of Chiang Mai University 2019
• Subjects: electron temperature; CCRF reactor; steady state corona approximatio
• Online Access: http://it.science.cmu.ac.th/ejournal/dl.php?journal_id=5521; http://cmuir.cmu.ac.th/jspui/handle/6653943832/66760
• Institution: Chiang Mai University

The electron temperature () was extracted from the capacitively-coupled radio frequency (CCRF) plasma reactor by the spectral line intensity ratio method. The measured intensity ratio of 587.6/706.5 nm from CH4/He plasma was used to calculate the electron temperature under the steady state corona (S...