Effect of Acetylene Concentration on Structural Properties of Hydrogenated Amorphous Carbon Films Prepared using Showerhead Plasma Chemical Vapor Deposition
Acetylene/argon plasma was used to deposit hydrogenated amorphous carbon (a-C:H) films using showerhead plasma CVD. The upper electrode was designed like a showerhead to spray gasses onto the grounded electrode and is connected to 10 kHz RF power. The a-C:H films were fabricated with a deposition ti...
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| Main Authors: | , , , , , , , |
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| Format: | บทความวารสาร |
| Language: | English |
| Published: |
Science Faculty of Chiang Mai University
2019
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| Online Access: | http://it.science.cmu.ac.th/ejournal/dl.php?journal_id=9532 http://cmuir.cmu.ac.th/jspui/handle/6653943832/64219 |
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| Institution: | Chiang Mai University |
| Language: | English |