Effects of microwave power on the structural and emission properties of hydrogenated amorphous silicon carbide deposited by electron cyclotron resonance chemical vapor deposition

Effects of microwave power on the structural and emission properties of hydrogenated amorphous silicon carbide deposited by electron cyclotron resonance chemical vapor deposition

10.1063/1.1344218

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Bibliographic Details
Main Authors: Cui, J., Rusli, R., Yoon, S.F., Yu, M.B., Chew, K., Ahn, J., Zhang, Q., Teo, E.J., Osipowicz, T., Watt, F.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96368
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/96368

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