Effects of microwave power on the structural and emission properties of hydrogenated amorphous silicon carbide deposited by electron cyclotron resonance chemical vapor deposition

• Main Authors: Cui, J., Rusli, R., Yoon, S.F., Yu, M.B., Chew, K., Ahn, J., Zhang, Q., Teo, E.J., Osipowicz, T., Watt, F.
• Other Authors: PHYSICS
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/96368
• Institution: National University of Singapore

10.1063/1.1344218