Investigation of molybdenum-carbon films (Mo-C:H) deposited using an electron cyclotron resonance chemical vapor deposition system

Investigation of molybdenum-carbon films (Mo-C:H) deposited using an electron cyclotron resonance chemical vapor deposition system

Journal of Applied Physics

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Bibliographic Details
Main Authors: Rusli, Yoon, S.F., Huang, Q.F., Yang, H., Yu, M.B., Ahn, J., Zhang, Q., Teo, E.J., Osipowicz, T., Watt, F.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96979
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/96979

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