Investigation of molybdenum-carbon films (Mo-C:H) deposited using an electron cyclotron resonance chemical vapor deposition system

• Main Authors: Rusli, Yoon, S.F., Huang, Q.F., Yang, H., Yu, M.B., Ahn, J., Zhang, Q., Teo, E.J., Osipowicz, T., Watt, F.
• Other Authors: PHYSICS
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/96979
• Institution: National University of Singapore

Journal of Applied Physics