Investigation of molybdenum-carbon films (Mo-C:H) deposited using an electron cyclotron resonance chemical vapor deposition system

Investigation of molybdenum-carbon films (Mo-C:H) deposited using an electron cyclotron resonance chemical vapor deposition system

Journal of Applied Physics

Saved in:
Bibliographic Details
Main Authors: Rusli, Yoon, S.F., Huang, Q.F., Yang, H., Yu, M.B., Ahn, J., Zhang, Q., Teo, E.J., Osipowicz, T., Watt, F.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96979
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
id sg-nus-scholar.10635-96979
record_format dspace
spelling sg-nus-scholar.10635-969792015-02-20T20:22:35Z Investigation of molybdenum-carbon films (Mo-C:H) deposited using an electron cyclotron resonance chemical vapor deposition system Rusli Yoon, S.F. Huang, Q.F. Yang, H. Yu, M.B. Ahn, J. Zhang, Q. Teo, E.J. Osipowicz, T. Watt, F. PHYSICS Journal of Applied Physics 88 6 3699-3704 JAPIA 2014-10-16T09:29:51Z 2014-10-16T09:29:51Z 2000-09 Article Rusli,Yoon, S.F.,Huang, Q.F.,Yang, H.,Yu, M.B.,Ahn, J.,Zhang, Q.,Teo, E.J.,Osipowicz, T.,Watt, F. (2000-09). Investigation of molybdenum-carbon films (Mo-C:H) deposited using an electron cyclotron resonance chemical vapor deposition system. Journal of Applied Physics 88 (6) : 3699-3704. ScholarBank@NUS Repository. 00218979 http://scholarbank.nus.edu.sg/handle/10635/96979 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Journal of Applied Physics
author2 PHYSICS
author_facet PHYSICS
Rusli
Yoon, S.F.
Huang, Q.F.
Yang, H.
Yu, M.B.
Ahn, J.
Zhang, Q.
Teo, E.J.
Osipowicz, T.
Watt, F.
format Article
author Rusli
Yoon, S.F.
Huang, Q.F.
Yang, H.
Yu, M.B.
Ahn, J.
Zhang, Q.
Teo, E.J.
Osipowicz, T.
Watt, F.
spellingShingle Rusli
Yoon, S.F.
Huang, Q.F.
Yang, H.
Yu, M.B.
Ahn, J.
Zhang, Q.
Teo, E.J.
Osipowicz, T.
Watt, F.
Investigation of molybdenum-carbon films (Mo-C:H) deposited using an electron cyclotron resonance chemical vapor deposition system
author_sort Rusli
title Investigation of molybdenum-carbon films (Mo-C:H) deposited using an electron cyclotron resonance chemical vapor deposition system
title_short Investigation of molybdenum-carbon films (Mo-C:H) deposited using an electron cyclotron resonance chemical vapor deposition system
title_full Investigation of molybdenum-carbon films (Mo-C:H) deposited using an electron cyclotron resonance chemical vapor deposition system
title_fullStr Investigation of molybdenum-carbon films (Mo-C:H) deposited using an electron cyclotron resonance chemical vapor deposition system
title_full_unstemmed Investigation of molybdenum-carbon films (Mo-C:H) deposited using an electron cyclotron resonance chemical vapor deposition system
title_sort investigation of molybdenum-carbon films (mo-c:h) deposited using an electron cyclotron resonance chemical vapor deposition system
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/96979
_version_ 1681091757612204032

Similar Items