Tungsten-carbon thin films deposited using screen grid technique in an electron cyclotron resonance chemical vapour deposition system

Tungsten-carbon thin films deposited using screen grid technique in an electron cyclotron resonance chemical vapour deposition system

10.1016/S0257-8972(99)00474-0

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Bibliographic Details
Main Authors: Rusli, Yoon, S.F., Yang, H., Ahn, J., Huang, Q.F., Zhang, Q., Guo, Y.P., Yang, C.Y., Teo, E.J., Wee, A.T.S., Huan, A.C.H., Watt, F.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
Diamond-like carbon
ECR-CVD
Metal-carbon films
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98464
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/98464

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