Tungsten-carbon thin films deposited using screen grid technique in an electron cyclotron resonance chemical vapour deposition system

• Main Authors: Rusli, Yoon, S.F., Yang, H., Ahn, J., Huang, Q.F., Zhang, Q., Guo, Y.P., Yang, C.Y., Teo, E.J., Wee, A.T.S., Huan, A.C.H., Watt, F.
• Other Authors: PHYSICS
• Format: Article
• Published: 2014
• Subjects: Diamond-like carbon; ECR-CVD; Metal-carbon films
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/98464
• Institution: National University of Singapore

10.1016/S0257-8972(99)00474-0