Tungsten-carbon thin films deposited using screen grid technique in an electron cyclotron resonance chemical vapour deposition system

10.1016/S0257-8972(99)00474-0

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Main Authors:	Rusli, Yoon, S.F., Yang, H., Ahn, J., Huang, Q.F., Zhang, Q., Guo, Y.P., Yang, C.Y., Teo, E.J., Wee, A.T.S., Huan, A.C.H., Watt, F.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	Diamond-like carbon ECR-CVD Metal-carbon films
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98464
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98464
record_format	dspace
spelling	sg-nus-scholar.10635-984642023-10-25T07:40:41Z Tungsten-carbon thin films deposited using screen grid technique in an electron cyclotron resonance chemical vapour deposition system Rusli Yoon, S.F. Yang, H. Ahn, J. Huang, Q.F. Zhang, Q. Guo, Y.P. Yang, C.Y. Teo, E.J. Wee, A.T.S. Huan, A.C.H. Watt, F. PHYSICS Diamond-like carbon ECR-CVD Metal-carbon films 10.1016/S0257-8972(99)00474-0 Surface and Coatings Technology 123 2-3 134-139 SCTEE 2014-10-16T09:47:23Z 2014-10-16T09:47:23Z 2000-01-24 Article Rusli, Yoon, S.F., Yang, H., Ahn, J., Huang, Q.F., Zhang, Q., Guo, Y.P., Yang, C.Y., Teo, E.J., Wee, A.T.S., Huan, A.C.H., Watt, F. (2000-01-24). Tungsten-carbon thin films deposited using screen grid technique in an electron cyclotron resonance chemical vapour deposition system. Surface and Coatings Technology 123 (2-3) : 134-139. ScholarBank@NUS Repository. https://doi.org/10.1016/S0257-8972(99)00474-0 02578972 http://scholarbank.nus.edu.sg/handle/10635/98464 000084717100007 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Diamond-like carbon ECR-CVD Metal-carbon films
spellingShingle	Diamond-like carbon ECR-CVD Metal-carbon films Rusli Yoon, S.F. Yang, H. Ahn, J. Huang, Q.F. Zhang, Q. Guo, Y.P. Yang, C.Y. Teo, E.J. Wee, A.T.S. Huan, A.C.H. Watt, F. Tungsten-carbon thin films deposited using screen grid technique in an electron cyclotron resonance chemical vapour deposition system
description	10.1016/S0257-8972(99)00474-0
author2	PHYSICS
author_facet	PHYSICS Rusli Yoon, S.F. Yang, H. Ahn, J. Huang, Q.F. Zhang, Q. Guo, Y.P. Yang, C.Y. Teo, E.J. Wee, A.T.S. Huan, A.C.H. Watt, F.
format	Article
author	Rusli Yoon, S.F. Yang, H. Ahn, J. Huang, Q.F. Zhang, Q. Guo, Y.P. Yang, C.Y. Teo, E.J. Wee, A.T.S. Huan, A.C.H. Watt, F.
author_sort	Rusli
title	Tungsten-carbon thin films deposited using screen grid technique in an electron cyclotron resonance chemical vapour deposition system
title_short	Tungsten-carbon thin films deposited using screen grid technique in an electron cyclotron resonance chemical vapour deposition system
title_full	Tungsten-carbon thin films deposited using screen grid technique in an electron cyclotron resonance chemical vapour deposition system
title_fullStr	Tungsten-carbon thin films deposited using screen grid technique in an electron cyclotron resonance chemical vapour deposition system
title_full_unstemmed	Tungsten-carbon thin films deposited using screen grid technique in an electron cyclotron resonance chemical vapour deposition system
title_sort	tungsten-carbon thin films deposited using screen grid technique in an electron cyclotron resonance chemical vapour deposition system
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98464
_version_	1781786880784728064

Tungsten-carbon thin films deposited using screen grid technique in an electron cyclotron resonance chemical vapour deposition system

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