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Richard D'Costa, Vijay
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Richard D'Costa, Vijay
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Infrared spectroscopic ellipsometry study of sulfur-doped In0.53Ga0.47As ultra-shallow junctions
by
Richard
D'Costa
,
Vijay
,
Subramanian, Sujith
,
Li, Daosheng
,
Wicaksono, Satrio
,
Yoon, Soon Fatt
,
Tok, Eng Soon
,
Yeo, Yee-Chia
Published 2014
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