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Investigation of surface roughness on platinum deposited wafer after reactive ion etching using SF₆+Argon gaseous

Investigation of surface roughness on platinum deposited wafer after reactive ion etching using SF₆+Argon gaseous

by Zaliman, Sauli, Dr., Retnasamy, Vithyacharan, Aaron, Koay Terr Yeow, Siew Chui, Goh, Khairul Anwar, Mohamad Khazali, Nooraihan, Abdullah
Published 2014

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2

Surface roughness scrutinizaton with RIE CF₄+Argon gaseous on platinum deposited wafer

Surface roughness scrutinizaton with RIE CF₄+Argon gaseous on platinum deposited wafer

by Zaliman, Sauli, Dr., Retnasamy, Vithyacharan, Aaron, Koay Terr Yeow, Siew Chui, Goh, Khairul Anwar, Mohamad Khazali, Nooraihan, Abdullah
Published 2014

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Article