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Yong, J.J.
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Yong, J.J.
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Direct nanoimprint lithography of Al 2O 3 using a chelated monomer-based precursor
by
Ganesan, R.
,
Dinachali, S.S.
,
Lim, S.H.
,
Saifullah, M.S.M.
,
Chong, W.T.
,
Lim, A.H.H.
,
Yong
,
J.J
.
,
Thian, E.S.
,
He, C.
,
Low, H.Y.
Published 2014
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