Silica microchannel fabrication using fluorine based rie with alas a mask

by Wan Mokhzani, Wan Norhaimi, Retnasamy, Vithyacharan, Zaliman, Sauli, Assoc. Prof. Dr., Taniselass, Steven, Ahmad Husni, Mohd Shapri, Norazeani, Abdul Rahman, Abdul Halis, Abdul Aziz
Published 2013

Development of MEMS Manifold Absolute Pressure Sensor (MAPs) Prototype

by Zaliman, Sauli, Assoc. Prof., Hasnizah, Aris, Johari, Adnan, Assoc. Prof. Dr., Poopalan, Prabakaran, Assoc. Prof. Dr., Ramzan, Mat Ayub, Rizalafande, Che Ismail, Sohiful Anuar, Zainol Murad, Azuwir, Md. Nor, Abu Hassan, Abdullah, Mohd. Hatta, Musa, Razaidi, Hussin
Published 2010

Development of MEMS Manifold Absolute Pressure Sensor (MAPs) Prototype

by Zaliman, Sauli, Assoc. Prof., Hasnizah, Aris, Johari, Adnan, Assoc. Prof. Dr., Poopalan, Prabakaran, Assoc. Prof. Dr., Ramzan, Mat Ayub, Rizalafande, Che Ismail, Sohiful Anuar, Zainol Murad, Azuwir, Md. Nor, Abu Hassan, Abdullah, Mohd. Hatta, Musa, Razaidi, Hussin
Published 2010