INITIAL STUDY OF CNT GROWTH USING NANOCATALYST AG PRECURSOR BY HWC-VHF-PECVD
Carbon nanotube (CNT) is one of interesting nanotechnology research topics because of the unique of electronic and mechanical properties. In this research we study CNT deposition by growing silver (Ag) nanocatalyst on the corning glass 7059 substrate as a precursor (guide) by the use of the evaporat...
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| Format: | Theses |
| Language: | Indonesia |
| Online Access: | https://digilib.itb.ac.id/gdl/view/14760 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |
| Summary: | Carbon nanotube (CNT) is one of interesting nanotechnology research topics because of the unique of electronic and mechanical properties. In this research we study CNT deposition by growing silver (Ag) nanocatalyst on the corning glass 7059 substrate as a precursor (guide) by the use of the evaporation method. The nanocatalyst growth was done by varying deposition time for 50 seconds, 25 <br />
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seconds, and 14 seconds. The obtained nanocatalyat was then annealed at temperature of 400 oC for 4 hours, and characterized using Scanning Electron Microscope (SEM) and Energy Dispersive X-ray (EDX) methods. The diameter size of nanocatalyst decreased from 65 nm, 57 nm, and 33 nm, and also the silver atomic composition from 6,06%, 4,52%, and 3,73%. The CNT growth have done on the nanocatalyst substrate using the Hot Wire Cell - Very High Frequency - Plasma Enhanced Chemical Vapor Deposition (HWC-VHF-PECVD) method at low substrate temperature of 275 oC and pressure of 300 mTorr. The rf power have been varied from 8 to 20 watts, while the deposition time fixed for 60 minutes. The 99.999 % methane gas will be used as a gas source. The H2 gas was also used to etch oxide layers during pre depostion process. The size of diameter and length of CNT on Ag/CG 7059 are 250-393 nm and 309-376, respectively, <br />
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for the particle which is clusters. Meanwhile, for the particle which is tubes has diameter and length 125 nm and 1,650-2,989 (mu)m, respectively. The rf power of 8 and 10 watts have the CNTs is vertically and horizontal shape of surface substrates. <br />
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