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VLS (Vapor-Liquid-Solid) mechanism is one of the most important mechanism in the fabrication of nanomaterial structure. Growth of catalyzed SiNW uses this mechanism. Growth of catalyst thin film is the initial step of this mechanism, which then followed by nanocluster formation by annealing process....

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主要作者: FIKRI HIDAYAT (NIM : 10207076); Pembimbing : Prof. Dr. Toto Winata, AULIA
格式: Final Project
語言:Indonesia
在線閱讀:https://digilib.itb.ac.id/gdl/view/15089
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機構: Institut Teknologi Bandung
語言: Indonesia