STUDY OF SILICON NANOWIRE GROWTH ON Ag CATALYST USING HWC-IN PLASMA-VHF-PECVD THROUGH PRESSURE OPTIMIZATION
Development of nanotechnology like nanowire is still growing rapidly and has become a very interesting research topic. Research on silikon nanowire (SiNW) growth has been performed by using plasma enhanced chemical vapour deposition (PECVD). Before the silicon nanowire grown by PECVD method, metal n...
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| 格式: | Theses |
| 語言: | Indonesia |
| 在線閱讀: | https://digilib.itb.ac.id/gdl/view/15395 |
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| 機構: | Institut Teknologi Bandung |
| 語言: | Indonesia |