Efek Kadar Oksigen, Laju Deposisi dan Annealing Terhadap Sifat Listrik, Optik dan Struktur Mikro pada Pembuatan Lapisan Tipis Indium Tin Oksida
This film ofindiwn tin oxide (ITO) with 90 % ofIn203 and 10 % ofSn02 has been manufactured with thickness 611,4 run and 606,9 run by means of dc sputtering in vacuum by pressure of 10.5 mBar on the glass substrate. The study was conducted to find out the effect of oxygen content change, depositio...
Saved in:
| Main Author: | |
|---|---|
| Format: | Theses and Dissertations NonPeerReviewed |
| Language: | English English |
| Published: |
2005
|
| Subjects: | |
| Online Access: | https://repository.unair.ac.id/133616/1/KKC%20KK%20Dis%20Mus%20e_ABSTRACT.pdf https://repository.unair.ac.id/133616/2/KKC%20KK%20Dis%20Mus%20e.pdf https://repository.unair.ac.id/133616/ http://lib.unair.ac.id |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Universitas Airlangga |
| Language: | English English |