Laser plasma soft X-Ray sources application in microlithography
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| Main Authors: | , |
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| Format: | Theses and Dissertations NonPeerReviewed |
| Published: |
[Amsterdam] : Vrije Universiteit
1993
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| Subjects: | |
| Online Access: | https://repository.ugm.ac.id/51980/ http://etd.ugm.ac.id/index.php?mod=penelitian_detail&sub=PenelitianDetail&act=view&typ=html&buku_id=12845 |
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| Institution: | Universitas Gadjah Mada |
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id-ugm-repo.519802014-08-20T06:09:34Z https://repository.ugm.ac.id/51980/ Laser plasma soft X-Ray sources application in microlithography , BIJKERK, Fred , Prof.dr. M.J. van der Wiel ETD [Amsterdam] : Vrije Universiteit 1993 Thesis NonPeerReviewed , BIJKERK, Fred and , Prof.dr. M.J. van der Wiel (1993) Laser plasma soft X-Ray sources application in microlithography. UNSPECIFIED thesis, UNSPECIFIED. http://etd.ugm.ac.id/index.php?mod=penelitian_detail&sub=PenelitianDetail&act=view&typ=html&buku_id=12845 |
| institution |
Universitas Gadjah Mada |
| building |
UGM Library |
| country |
Indonesia |
| collection |
Repository Civitas UGM |
| topic |
ETD |
| spellingShingle |
ETD , BIJKERK, Fred , Prof.dr. M.J. van der Wiel Laser plasma soft X-Ray sources application in microlithography |
| format |
Theses and Dissertations NonPeerReviewed |
| author |
, BIJKERK, Fred , Prof.dr. M.J. van der Wiel |
| author_facet |
, BIJKERK, Fred , Prof.dr. M.J. van der Wiel |
| author_sort |
, BIJKERK, Fred |
| title |
Laser plasma soft X-Ray sources application in microlithography |
| title_short |
Laser plasma soft X-Ray sources application in microlithography |
| title_full |
Laser plasma soft X-Ray sources application in microlithography |
| title_fullStr |
Laser plasma soft X-Ray sources application in microlithography |
| title_full_unstemmed |
Laser plasma soft X-Ray sources application in microlithography |
| title_sort |
laser plasma soft x-ray sources application in microlithography |
| publisher |
[Amsterdam] : Vrije Universiteit |
| publishDate |
1993 |
| url |
https://repository.ugm.ac.id/51980/ http://etd.ugm.ac.id/index.php?mod=penelitian_detail&sub=PenelitianDetail&act=view&typ=html&buku_id=12845 |
| _version_ |
1681221857754218496 |