Design and optimization of a micro capacitive pressure sensor

• Main Authors: Tahmasebpour, Kamyar, Shobaki, Mohammed M., Hrairi, Meftah
• Format: Conference or Workshop Item
• Language: English; English
• Published: 2013
• Subjects: TA165 Engineering instruments, meters, etc. Industrial instrumentation
• Online Access: http://irep.iium.edu.my/32171/1/Paper_30177_-_Camera_ready.pdf; http://irep.iium.edu.my/32171/4/Proceeding-CoverPage.pdf; http://irep.iium.edu.my/32171/
• Institution: Universiti Islam Antarabangsa Malaysia

The shape of Micropressure sensors has influence on their accuracy. In this paper, a rectangular membrane type Micropressure sensor had been modeled using finite element package and shape optimization in order to design a more accurate flexible membrane. The results show that adding a slim wall, to protect the pressure sensor and system during pressure shocks, has a negligible effect on the membrane flexibility. Moreover, the simulation results show that the sensor exhibits a linear response with wide range of pressure from 0.01 MPa to 70 MPa. Furthermore, the simulation results yielded that the load-deflection responses could be enhanced using a spacer.