Tracking control of a nanopositioner using complementary sensors
Piezoelectric tube actuators are widely used in atomic force and scanning tunneling microscopy (STM) for nanoscale positioning. There has been a consistent effort to increase the scan speed of these actuators using feedback control techniques. A feedback controller requires a measurement of the scan...
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Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
Institute of Electrical and Electronics Engineers (IEEE)
2009
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Subjects: | |
Online Access: | http://irep.iium.edu.my/5210/1/Tracking_Control_of_a_Nanopositioner_Using_Complementary_Sensors.pdf http://irep.iium.edu.my/5210/ http://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=7729 |
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Institution: | Universiti Islam Antarabangsa Malaysia |
Language: | English |