Effects of argon/nitrogen sputtering gas on the microstructural, crystallographic and piezoelectric properties of AlN thin films

Effects of argon/nitrogen sputtering gas on the microstructural, crystallographic and piezoelectric properties of AlN thin films

The growth of highly crystalline c-plane AlN (002) is extremely difficult, entailing high temperature and ultrahigh vacuum condition. In sputtering technique, the addition of nitrogen into argon sputtering gas can significantly assist the formation of AlN (002) at low temperature. We incorporated pu...

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Bibliographic Details
Main Authors: Abd Samad, Muhammad Izzuddin, Noor, Mimiwaty Mohd, Nayan, Nafarizal, Abu Bakar, Ahmad Shuhaimi, Mansor, Marwan, Zuhdi, Ahmad Wafi Mahmood, Hamzah, Azrul Azlan, Latif, Rhonira
Format: Article
Published: Pergamon-Elsevier Science Ltd 2023
Subjects:
QC Physics
TN Mining engineering. Metallurgy
Online Access:http://eprints.um.edu.my/39247/
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Institution: Universiti Malaya

Internet

http://eprints.um.edu.my/39247/

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