Effects of argon/nitrogen sputtering gas on the microstructural, crystallographic and piezoelectric properties of AlN thin films

• Main Authors: Abd Samad, Muhammad Izzuddin, Noor, Mimiwaty Mohd, Nayan, Nafarizal, Abu Bakar, Ahmad Shuhaimi, Mansor, Marwan, Zuhdi, Ahmad Wafi Mahmood, Hamzah, Azrul Azlan, Latif, Rhonira
• Format: Article
• Published: Pergamon-Elsevier Science Ltd 2023
• Subjects: QC Physics; TN Mining engineering. Metallurgy
• Online Access: http://eprints.um.edu.my/39247/
• Institution: Universiti Malaya

The growth of highly crystalline c-plane AlN (002) is extremely difficult, entailing high temperature and ultrahigh vacuum condition. In sputtering technique, the addition of nitrogen into argon sputtering gas can significantly assist the formation of AlN (002) at low temperature. We incorporated pu...