Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films

Nanocrystalline nickel-tungsten alloys have great potential in the fabrication of components for microelectromechanical systems. Here the fracture toughness of Ni-12.7 at.W alloy micro-cantilever beams was investigated. Micro-cantilevers were fabricated by UV lithography and electrodeposition and no...

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Main Authors: Armstrong, D.E.J., Haseeb, A.S. Md. Abdul, Roberts, S.G., Wilkinson, A.J., Bade, K.
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Published: 2012
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Online Access:http://eprints.um.edu.my/5462/
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spelling my.um.eprints.54622018-10-17T00:51:39Z http://eprints.um.edu.my/5462/ Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films Armstrong, D.E.J. Haseeb, A.S. Md. Abdul Roberts, S.G. Wilkinson, A.J. Bade, K. TA Engineering (General). Civil engineering (General) Nanocrystalline nickel-tungsten alloys have great potential in the fabrication of components for microelectromechanical systems. Here the fracture toughness of Ni-12.7 at.W alloy micro-cantilever beams was investigated. Micro-cantilevers were fabricated by UV lithography and electrodeposition and notched by focused ion beam machining. Load was applied using a nanoindenter and fracture toughness was calculated from the fracture load. Fracture toughness of the Ni-12.7 at.W was in the range of 1.49-5.14 MPa root m. This is higher than the fracture toughness of Si (another important microelectromechanical systems material), but considerably lower than that of electrodeposited nickel and other nickel based alloys. (C) 2012 Elsevier B.V. All rights reserved. 2012 Article PeerReviewed Armstrong, D.E.J. and Haseeb, A.S. Md. Abdul and Roberts, S.G. and Wilkinson, A.J. and Bade, K. (2012) Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films. Thin Solid Films, 520 (13). pp. 4369-4372. ISSN 0040-6090
institution Universiti Malaya
building UM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaya
content_source UM Research Repository
url_provider http://eprints.um.edu.my/
topic TA Engineering (General). Civil engineering (General)
spellingShingle TA Engineering (General). Civil engineering (General)
Armstrong, D.E.J.
Haseeb, A.S. Md. Abdul
Roberts, S.G.
Wilkinson, A.J.
Bade, K.
Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films
description Nanocrystalline nickel-tungsten alloys have great potential in the fabrication of components for microelectromechanical systems. Here the fracture toughness of Ni-12.7 at.W alloy micro-cantilever beams was investigated. Micro-cantilevers were fabricated by UV lithography and electrodeposition and notched by focused ion beam machining. Load was applied using a nanoindenter and fracture toughness was calculated from the fracture load. Fracture toughness of the Ni-12.7 at.W was in the range of 1.49-5.14 MPa root m. This is higher than the fracture toughness of Si (another important microelectromechanical systems material), but considerably lower than that of electrodeposited nickel and other nickel based alloys. (C) 2012 Elsevier B.V. All rights reserved.
format Article
author Armstrong, D.E.J.
Haseeb, A.S. Md. Abdul
Roberts, S.G.
Wilkinson, A.J.
Bade, K.
author_facet Armstrong, D.E.J.
Haseeb, A.S. Md. Abdul
Roberts, S.G.
Wilkinson, A.J.
Bade, K.
author_sort Armstrong, D.E.J.
title Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films
title_short Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films
title_full Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films
title_fullStr Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films
title_full_unstemmed Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films
title_sort nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline ni-w alloy films
publishDate 2012
url http://eprints.um.edu.my/5462/
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