Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films
Nanocrystalline nickel-tungsten alloys have great potential in the fabrication of components for microelectromechanical systems. Here the fracture toughness of Ni-12.7 at.W alloy micro-cantilever beams was investigated. Micro-cantilevers were fabricated by UV lithography and electrodeposition and no...
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my.um.eprints.54622018-10-17T00:51:39Z http://eprints.um.edu.my/5462/ Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films Armstrong, D.E.J. Haseeb, A.S. Md. Abdul Roberts, S.G. Wilkinson, A.J. Bade, K. TA Engineering (General). Civil engineering (General) Nanocrystalline nickel-tungsten alloys have great potential in the fabrication of components for microelectromechanical systems. Here the fracture toughness of Ni-12.7 at.W alloy micro-cantilever beams was investigated. Micro-cantilevers were fabricated by UV lithography and electrodeposition and notched by focused ion beam machining. Load was applied using a nanoindenter and fracture toughness was calculated from the fracture load. Fracture toughness of the Ni-12.7 at.W was in the range of 1.49-5.14 MPa root m. This is higher than the fracture toughness of Si (another important microelectromechanical systems material), but considerably lower than that of electrodeposited nickel and other nickel based alloys. (C) 2012 Elsevier B.V. All rights reserved. 2012 Article PeerReviewed Armstrong, D.E.J. and Haseeb, A.S. Md. Abdul and Roberts, S.G. and Wilkinson, A.J. and Bade, K. (2012) Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films. Thin Solid Films, 520 (13). pp. 4369-4372. ISSN 0040-6090 |
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TA Engineering (General). Civil engineering (General) Armstrong, D.E.J. Haseeb, A.S. Md. Abdul Roberts, S.G. Wilkinson, A.J. Bade, K. Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films |
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Nanocrystalline nickel-tungsten alloys have great potential in the fabrication of components for microelectromechanical systems. Here the fracture toughness of Ni-12.7 at.W alloy micro-cantilever beams was investigated. Micro-cantilevers were fabricated by UV lithography and electrodeposition and notched by focused ion beam machining. Load was applied using a nanoindenter and fracture toughness was calculated from the fracture load. Fracture toughness of the Ni-12.7 at.W was in the range of 1.49-5.14 MPa root m. This is higher than the fracture toughness of Si (another important microelectromechanical systems material), but considerably lower than that of electrodeposited nickel and other nickel based alloys. (C) 2012 Elsevier B.V. All rights reserved. |
format |
Article |
author |
Armstrong, D.E.J. Haseeb, A.S. Md. Abdul Roberts, S.G. Wilkinson, A.J. Bade, K. |
author_facet |
Armstrong, D.E.J. Haseeb, A.S. Md. Abdul Roberts, S.G. Wilkinson, A.J. Bade, K. |
author_sort |
Armstrong, D.E.J. |
title |
Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films |
title_short |
Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films |
title_full |
Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films |
title_fullStr |
Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films |
title_full_unstemmed |
Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films |
title_sort |
nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline ni-w alloy films |
publishDate |
2012 |
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http://eprints.um.edu.my/5462/ |
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1643687583270567936 |